KAJIAN PENGUKURAN KETEBALAN LAPISAN TIPIS BERBASIS INTERFEROMETRIK

RASANJANI, DODI (2009) KAJIAN PENGUKURAN KETEBALAN LAPISAN TIPIS BERBASIS INTERFEROMETRIK. Other thesis, Universitas Sebelas Maret.

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    Abstract

    One of the most important properties to known is the thickness of the film. The result of research reported the method and construction of an optical system which uses based an interferometer Michelson, which allows can applied to determine the thickness of thin film after grown up on a glass and alumunium substrates. A measure technique based on the comparison of two patterns interference which produced by a Laser with wavelength 632.8 nm . Comparison between two patterns of interference which generated by substrate without and with film is taken into a count for the measuring thickness of thin film. This Method that has been conducted can measure film thickness in range of (90-218) nm.

    Item Type: Thesis (Other)
    Subjects: Q Science > QC Physics
    Divisions: Fakultas Matematika dan Ilmu Pengetahuan Alam
    Fakultas Matematika dan Ilmu Pengetahuan Alam > Fisika
    Depositing User: Vignasari Kokasih
    Date Deposited: 12 Jul 2013 00:54
    Last Modified: 12 Jul 2013 00:54
    URI: https://eprints.uns.ac.id/id/eprint/2408

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